Ravikiran Attota Ph.D., M.E., B.E.
Deputy Director, Nanotechnology Core Facility — Office of Scientific Coordination
Ravikiran Attota, Ph.D., M.E., B.E.
(301) 796-2311
NCTRResearch@fda.hhs.gov
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Background
Dr. Ravikiran Attota is a Mechanical Engineer with over 25 years of federal and international research experience. He currently serves as Deputy Director of the Nanotechnology Core Facility at the U.S. Food and Drug Administration’s (FDA) National Center for Toxicological Research (NCTR).
Prior to joining the FDA, Dr. Attota spent over two decades at the National Institute of Standards and Technology (NIST) in various roles, including Mechanical Engineer, Project Leader, and IT Security Officer. His research focused on optical metrology, nanotechnology, semiconductor process control, and computational imaging. He possesses deep expertise in instrumentation, numerical optical simulations, AI/ML-enabled image analysis, software development, and hardware-software integration.
Before NIST, Dr. Attota conducted postdoctoral research at the Data Storage Institute, National University of Singapore, and was a Humboldt Research Fellow at the Karlsruhe Research Center in Germany.
Dr. Attota earned his Ph.D. and M.E. in Mechanical Engineering from the Indian Institute of Science, Bangalore, and his B.E. from Osmania University, Hyderabad, India. He is the author of more than 80 technical publications and holds two U.S. patents.
Key Scientific Contributions
- Invented Through-Focus Scanning Optical Microscopy (TSOM), a technique that enables conventional optical microscopes to perform 3D shape characterization on nanoscale to microscale targets with sub-nanometer sensitivity. TSOM received an R&D 100 Award and has been incorporated into major international technology roadmaps, including IEEE-IRDS, ITRS, SEMI, and SEMATECH.
- Identified and resolved long-standing measurement biases in nanoparticle sizing using SEM and AFM reference tools, significantly improving measurement accuracy and reliability.
- Discovered and mitigated Angular Illumination Asymmetry (ANILAS) in optical microscopes, enhancing the accuracy of quantitative optical measurements (R&D 100 Award Finalist).
- Made significant contributions to semiconductor overlay metrology, for which he received a Silver Medal from the U.S. Department of Commerce.
- Developed a novel method for wear quantification that enables consistent and reliable comparison of wear rates across different experimental conditions.
Current Role and Research Focus
As Deputy Director of the Nanotechnology Core Facility, Dr. Attota leads a multidisciplinary team of scientists and technicians and directs research focused on detecting, separating, and comprehensively characterizing the physicochemical properties of micro- and nanoplastics in food matrices using advanced analytical instrumentation.
In addition to his research, Dr. Attota manages daily facility operations, oversees a portfolio of advanced analytical instruments, and administers the facility’s annual operating budget. He maintains laboratory safety standards, ensures regulatory compliance, and implements preventive maintenance programs to keep all instruments in optimal condition. He also engages with stakeholders to align facility capabilities with organizational and regulatory priorities.
Analytical Instrumentation Portfolio at Nanocore
Microscopy & Imaging Systems
- Atomic Force Microscope (AFM)
- Cell Imaging Multi-Mode Reader (supports 6- to 384-well plates)
- Cryogenic Transmission Electron Microscope (Cryo-TEM)
- Dual-Head Compound Optical Microscope
- Field Emission Scanning Electron Microscope (FE-SEM) with Energy Dispersive X-ray Spectroscopy (EDS
- Gel Imaging System (Gel Doc)
- Low-Vacuum Scanning Electron Microscope (Low Vacuum SEM) with Energy Dispersive X-ray Spectroscopy (EDS)
- Low-Voltage Electron Microscope (LVEM)
- Scanning Electron Microscope (SEM)
- Serial Block-Face Scanning Electron Microscope (SBF-SEM)
- Stereo Microscope
- Transmission Electron Microscope (TEM)
Spectroscopy & Optical Techniques
- Confocal Raman with Micro Fourier Transform Infrared (FTIR) Microscope
- Fluorescence Spectrometer
- Fourier Transform Infrared (FTIR) Spectrometer
- Hyperspectral Imaging (HSI) System
- Multi-Modal Spectrometer (Absorption + Fluorescence + Raman) for Nanomaterials
- Time-Resolved Fluorescence (TRF) System
- Ultraviolet-Visible (UV-Vis) Spectrophotometer
Chromatography & Separation Systems
- Fast Protein Liquid Chromatography (FPLC) System
- High-Performance Liquid Chromatography - Asymmetric Flow Field-Flow Fractionation - Multi-Angle Light Scattering - Differential Refractometry - UV-Vis (HPLC-AFFF-MALS-dRI-UV-Vis) System
- High-Performance Liquid Chromatography - Charged Aerosol Detector (HPLC-CAD)
- High-Performance Liquid Chromatography - Evaporative Light Scattering Detector (HPLC-ELSD)
- Ion Chromatography System (IC)
- Ultra-Performance Liquid Chromatography - Triple Quadrupole Mass Spectrometry (UPLC-TQMS)
- Ultra-Performance Liquid Chromatography (UPLC) System
Elemental & Mass Spectrometry
- Carbon, Hydrogen, Nitrogen, Sulfur / Oxygen (CHNS/O) Elemental Analyzer
- Inductively Coupled Plasma Mass Spectrometry (ICP-MS)
- Inductively Coupled Plasma Mass Spectrometry Triple Quadrupole (ICP-MS Triple Quad)
- Laser Ablation (LA) System
- Single particle Inductively Coupled Plasma Mass Spectrometry (SP-ICP-MS)
Particle Size & Nanoparticle Characterization
- Dynamic Light Scattering (DLS) Instrument
- Laser Diffraction Particle Size Analyzer (LDPSA)
- Multi-Angle Dynamic Light Scattering (MADLS) Instrument
- Nanoparticle Tracking Analysis (NTA) Instrument
- Particle Counter
- Tunable Resistive Pulse Sensing (TRPS) Nanoparticle Analyzer
Thermal Analysis
- Pyrolysis-Gas Chromatography Mass Spectrometry (Pyrolysis-GCMS) System
- Thermogravimetric Analysis - Fourier Transform Infrared Spectroscopy - Gas Chromatography Mass Spectrometry (TGA-FTIR-GC/MS) Hyphenated System
- Thermogravimetric Analysis / Differential Scanning Calorimetry (TGA/DSC) Analyzer
Additional Analytical Instruments
- Cyclic Voltammetry System
- Nano Differential Scanning Calorimeter (DSC)
- Quartz Crystal Microbalance (QCM)
- Surface Area Analyzer (BET)
- Viscometer
- X-Ray Diffraction (XRD) Instrument
Biological & Cell Culture Equipment
- Cell Counter
- CO₂ Incubator
- Microplate Reader
- Mycoplasma Plate Reader
- Real-Time Cell Analysis (RTCA) System
Sample Preparation & Processing Equipment
- Automated Slide Stainer
- Bead Mill Homogenizer
- Benchtop Centrifuge
- Cryomill (Cryogenic Mill)
- Flash Chromatography System
- Lyophilizer (Freeze Dryer)
- Microcalorimeter
- Microfludizer
- Microtome
- Microwave Digestion System
- Nitrogen Evaporator
- Photoreactor
- Sonicator (Ultrasonic Processor)
- Sputter Coater
- Tangential Flow Filtration (TFF) System
- Tube Furnace -1200°C
- Ultracentrifuge
Selected Publications
- Enhancing 6 nm CD Patterned Defect Classification with TSOM and CNNs. Attota R., and Anaya A. 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), IEEE, pp. 1-5, 2023.
- Enhancing optical microscopy illumination to enable quantitative imaging. Agocs E., and Attota R. Scientific Reports, 8, 4782 (2018).
- Through-focus or volumetric type of optical imaging methods: a review. Attota R. J. Biomedical Optics, 23(7), 070901 (2018).
- Nondestructive shape process monitoring of three-dimensional, high-aspect-ratio targets using through-focus scanning optical microscopy. Attota R., Kang H., Scott K., Allen R., Vladar A.E., and Bunday B. Measurement Science and Technology, 29(12), 125007, (2018).
- Optical microscope illumination analysis using through-focus scanning optical microscopy. Attota R., and Park H. Optics Letters, 42, 2306 (2017).
- Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy. Attota R., Weck P., Kramar J.A., Bunday B., and Vartanian A.V. Optics Express, 24, 16574-16585 (2016).
- Step beyond Kohler illumination analysis for far-field quantitative imaging: angular illumination asymmetry (ANILAS) maps. Attota R. Optics Express, 24, 22616 (2016).
- Volume determination of irregularly-shaped quasi-spherical nanoparticles. Attota R., and Liu E.C. Analytical and Bioanalytical Chemistry, (2016).
- Resolving three-dimensional shape of sub-50 nm wide lines with nanometer-scale sensitivity using conventional optical microscopes. Attota R., and Dixson R. Applied Physics Letters, 105, 043101, July 29, 2014.
- Nanoparticle size determination using optical microscopes. Attota R., Kavuri P.P., Kang H., Kasica R., and Chen L. Appl. Phys. Lett. 105, 163105 (2014).
- Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node. Attota R., Bunday B., and Vartanian V. Appl. Phys. Lett. 102 (Issue 22), 222107 (2013).
- Patterned defect and CD metrology by TSOM beyond the 22 nm node. Arceo A., Bunday B., Vartanian V., and Attota R. Proc. SPIE 8324, 83240E (2012).
- Optical microscope angular illumination analysis. Attota R., and Silver R. Opt. Express 20, 6693-6702 (2012).
- Nanometrology using a through-focus scanning optical microscopy method. Attota R., and Silver A.R. Meas. Sci. Technol. 22, pp 024002, (2011).
- TSOM Method for Semiconductor Metrology. Attota R., Dixson R.G., Kramar J.A., Potzick J.E., Vladár A.E., Bunday B., Novak E., and Rudack A.A. Proc. of SPIE Vol. 7971, 79710T, 2011.
- Effect of contact pressure and load on wear of alumina. Ravikiran A., and Jahanmir S. WEAR, Vol. 251, p.980-984, (2001).
- Nano-wear mechanism of amorphous carbon thin films. Ravikiran, A and Low T. Tribology Letters, Vol. 8, p. 41-43, (2000).
- Wear mechanism based on wear anisotropy. Attota R. STLE Tribology Transactions, Vol. 43, p. 287-292, (2000).
- Influence of apparent pressure on wear behavior of self-mated alumina. Attota R. Journal of the American Ceramic Society, Vol. 83, 1302-1304, (2000).
- Effect of sliding conditions on formation of grain-pits due to wear anisotropy. Attota R. Journal of Materials Science Letters, Vol. 19, p. 1041-1043, (2000).
- Effect of interfacial layers on wear behavior of a dental glass-ceramic. Ravikiran A., and Jahanmir S. Journal of the American Ceramic Society, Vol. 83, pp 1831-1833, (2000).
- Wear quantification. Attota R. ASME Journal of Tribology, Vol. 122, p. 650-656, (2000).
- A better approach to wear rate representation in non-conformal contacts. Ravikiran, and Lim S. Wear, Vol. 225-229, p.1309-1314, (1999).
- Contact Information
- Ravikiran Attota
- (301) 796-2311
- Expertise
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ExpertiseApproachDomainTechnology & DisciplineToxicology